Flexible Conformal Micromachined Absolute Pressure Sensors
作者： Moinuddin Ahmed , Murali Chitteboyina , Donald P. Butler , Zeynep Celik-Butler
DOI: 10.1109/JMEMS.2015.2405071
关键词:
摘要: The fabrication and characterization of micromachined piezoresistive absolute pressure sensors in a flexible substrate is presented. A suspended aluminum oxide diaphragm containing nichrome (Ni-80%/Cr-20%) backed by vacuum cavity was utilized to form the sensor. piezoresistors were placed half-Wheatstone bridge geometry provide linear response thermal stability. average value gauge factor measured be 1.95. normalized Hooge coefficient $\text{K}_{1/f}$ found $4.64\times 10^{-11}$ for piezoresistors. displayed an sensitivity 1.25 nV/Pa noise equivalent (NEPr) 7.44 kPa bandwidth 1–10 Hz 1/ $f$ -noise limited regime. In Johnson noise-limited regime, NEPr 10 Pa 1-Hz bandwidth. [2014-0028]
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