Silicon microfabrication technologies for THz applications
作者： C. Jung-Kubiak , J. Gill , T. Reck , C. Lee , J. Siles
关键词:
摘要: Silicon micromachining technology is naturally suited for making THz components, where precision and accuracy are essentials. We report here the development of robust techniques to enable novel active passive components in submillimeter-wave region. These features will large format heterodyne arrays 3-D integration region, fabricating circuits structures becomes difficult with conventional machining.
sci-hub.se 参考文章(1)
Robert H. Lin, John S. Ward, Goutam Chattopadhyay, Harish Manohara, Risaku Toda, Silicon Micromachined Components at Terahertz Frequencies for Astrophysics and Planetary Applications Ninteenth International Symposium on Space Terahertz Technology. pp. 339- ,(2008)