High‐performance, focusing‐type, time‐of‐flight atom probe with a channeltron as a signal detector

作者: Toshio Sakurai , T. Hashizume , A. Jimbo

DOI: 10.1063/1.94542

关键词:

摘要: We have constructed a focusing‐type, time‐of‐flight atom probe which enables us to focus the ion beam spot of ∼1 mm diameter. Under this condition, channeltron can be used as signal detector replacing conventional channel plate. Practically 100% detection efficiency was achieved for first time in atom‐probe history.

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