作者: Toshio Sakurai , T. Hashizume , A. Jimbo
DOI: 10.1063/1.94542
关键词:
摘要: We have constructed a focusing‐type, time‐of‐flight atom probe which enables us to focus the ion beam spot of ∼1 mm diameter. Under this condition, channeltron can be used as signal detector replacing conventional channel plate. Practically 100% detection efficiency was achieved for first time in atom‐probe history.