Synthesis of hydrogenated amorphous carbon (a-C:H) thin films by HiPIMS-based processes

摘要: This thesis explores the feasibility of high power impulse magnetron sputtering (HiPIMS) to synthesize hydrogenated amorphous carbon (a-C:H) thin films in Ar-hydrocarbon ambient and relationship between process parameters, gas phase composition film properties. To this purpose a stable based on HiPIMS direct current (DCMS) has been developed. Four series were deposited by hybrid HiPIMS-DCMS pure DCMS processes at 15 mTorr pressure using different Ar-acetylene compositions substrate bias from 0 -350 V. The effect depositions properties was investigated characterizing scanning electron microscopy (SEM), x-ray reflectometry (XRR), nanoindentation elastic recoil detection analysis (ERDA). Moreover characterization done recording optical emission spectrum voltage waveforms discharge. revealed that is powerful tool for controlling such as density, deposition rate, hardness hydrogen content.