Tape-based epitaxial lift off apparatuses and methods
作者： Thomas J. Gmitter , Andreas Hegedus , Gang He , Melissa Archer
DOI:
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摘要: Embodiments of the invention generally relate to apparatuses and methods for producing epitaxial thin films devices by lift off (ELO) processes. In one embodiment, a method forming film during an ELO process is provided which includes coupling plurality substrates elongated support tape, wherein each substrate contains disposed over sacrificial layer wafer, exposing etchant etching while moving layers peeling from wafers tape. also include several apparatuses, continuous-type as well batch-type devices, including apparatus removing tape on were grown.
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