Optical coupling mechanisms in quantum well infrared photodetectors

摘要: Light coupling systems, such as gratings are required because quantum well infrared photodetectors do not respond to normal incident light due the mechanical selection rules associated with intersubband transitions. The resolution of photolithography and accuracy etching become key issues in producing smaller grating features sizes especially shorter wavelengths. An enhancement factor three 2D periodic fabricated on a QWIP structure was observed. Variation groove depth feature size can be theoretically explained.© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading abstract is permitted personal use only.