X-ray diffraction spectroscopy and X-ray photoelectron spectroscopy studies of Cu-doped ZnO films
作者： H. Xue , Y. Chen , X.L. Xu , G.H. Zhang , H. Zhang
DOI: 10.1016/J.PHYSE.2008.12.017
关键词:
摘要: Cu-doped ZnO films have been prepared using direct current co-reactive magnetron sputtering technique at different oxygen partial pressures. The microstructure and the chemical state of oxygen, copper zinc in was investigated by X-ray diffraction spectroscopy (XRD) photoelectron (XPS), respectively. results indicate that with moderate Cu doping can obtain wurtzite structure strong c-axis orientation. crystal quality ZnO:Cu also be enhanced enrichment process. XPS spectra zinc, show is helpful for stoichiometry films, which consistent analysis XRD.
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