The Application of Beam and Diffraction Techniques to Thin Film and Surface Micro-Analysis

摘要: A large number of methods currently available for the investigation thin films, interfaces and surfaces are reviewed. Some these such as AES, ESCA, ISS, LAMMA, LOES, SIMS ultrasound microscopy — typical “beam techniques” relatively young. The analytical features classical electron or X-ray diffraction surpass modern beam techniques either because they incorporate additional facilities (energy dispersive detection, energy-loss spectroscopy in SEM TEM) improvements instrumental setup a whole. These include line-width line-shift analysis Lang topography, can therefore give information not with techniques. Lack this may often make it impossible to solve given problem might lead wrong conclusions material research analysis.