MEMS four-terminal variable capacitor for low power capacitive adiabatic logic with high logic state differentiation

摘要: Abstract This paper presents a novel four-terminal variable capacitor (FTVC) dedicated to the recent concept of low power capacitive adiabatic logic (CAL). FTVC is based on silicon nano/micro technologies and intended achieve functions with better efficiency that by using field effect transistor (FET). The proposed consists two capacitors mechanically coupled electrically isolated, where comb-drive input controls gap-closing at output. To fully implement combinational logic, we propose types capacitors: positive (PVC) output capacitance value increases voltage, negative (NVC) decreases when voltage increases. A compact accurate electromechanical model has been developed. simulations demonstrate ability devices for CAL, improved features such as high states differentiation larger than 50% full-scale signal cascability both buffers inverters. Based presented analysis, 89% total injected energy in device can be recovered, remaining being dissipated through mechanical damping. During one cycle operation, buffer gate 10 × 2.5 µm2 dissipates only 0.9 fJ .