Plasma for deposition, grafting or etching and the chemistry of the plasma‐polymer interface involved

作者: F. Arefi-Khonsari , L. Amouroux

DOI: 10.1063/1.49467

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摘要: Cold plasma are now extensively used for surface treatment of polymers in order to modify properties such as wettability, adhesion, permeability, superficial conductivity, etc. In this paper, after a very brief introduction on the particularities nonequilibrium plasmas with respect classical processes, modification different will be studied by employing CF4 and its mixtures. Indeed through examples discussed terms fluorination, etching deposition. By combining in‐situ diagnostic techniques ex‐situ ones performed modified polymers, we have evidenced important role experimental conditions chemical nature substrate grafting, polymerization or mechanisms taking place at plasma‐polymer interface.

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