Visually guided microassembly using optical microscopes and active vision techniques

摘要: Robust micromanipulation strategies are needed in order to overcome a potential technology barrier the commercial development of complex microelectromechanical devices. In this paper we present experimental results that investigate use high resolution optical systems with controllable intrinsic and extrinsic parameters for microassembly applications. Results two active vision strategies, depth-from-defocus visual servoing, using an microscope presented. Depth-from-defocus indicate repeatability 8 /spl mu/m (just one magnitude greater than wavelength light) is achievable. Visual servoing demonstrate visually servoed motion over large scales submicron has been achieved. The ability servo made possible by unique formulation image Jacobian microscope.