A Combustion-Based MEMS Thermoelectric Power Generator
作者： Samuel B. Schaevitz , Aleksander J. Franz , Klavs F. Jensen , Martin A. Schmidt
DOI: 10.1007/978-3-642-59497-7_6
关键词:
摘要: A thermoelectric generator with integrated catalytic combustion has been microfabricated and successfully tested. The device consists of a high-temperature silicon-germanium thermopile supported on thermally insulating silicon nitride membrane. Heat is supplied by fuels the underside Power output generated from on-chip autothermal hydrogen, ammonia butane, external power used only to drive mass-flow controllers. was stable at temperatures up 500°C, voltages 7V thermal efficiencies 0.02%.
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sci-hub.st 参考文章(9)
J. Blair, J.M. Borrego, H.A. Lyden, THE EFFICIENCY OF THERMOELECTRIC GENERATORS ,(1958)
M.E. Thomas, M.P. Hartnett, J.E. McKay, A.K. Kapoor, J.D. Chinn, The potential of using refractory metals and barrier layers to generate high temperature interconnects international ieee vlsi multilevel interconnection conference. pp. 183- 190 ,(1988) , 10.1109/VMIC.1988.14191
J. S. Reid, E. Kolawa, C. M. Garland, M.-A. Nicolet, F. Cardone, D. Gupta, R. P. Ruiz, Amorphous (Mo, Ta, or W)-Si-N diffusion barriers for Al metallizations Journal of Applied Physics. ,vol. 79, pp. 1109- 1115 ,(1996) , 10.1063/1.360909
D.D.L Wijngaards, S.H Kong, M Bartek, R.F Wolffenbuttel, Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices Sensors and Actuators A-physical. ,vol. 85, pp. 316- 323 ,(2000) , 10.1016/S0924-4247(00)00417-9
T. S. Stavitskaya, A. Gelbtuch, E. K. Iordanishvili, A. F. Ioffe, L. S. Stil'bans, George Vineyard, Semiconductor Thermoelements and Thermoelectric Cooling ,(1957)
Klavs F. Jensen, Microchemical systems: Status, challenges, and opportunities Aiche Journal. ,vol. 45, pp. 2051- 2054 ,(1999) , 10.1002/AIC.690451003
Ravi Srinivasan, I-Ming Hsing, Peter E. Berger, Klavs F. Jensen, Samara L. Firebaugh, Martin A. Schmidt, Michael P. Harold, Jan J. Lerou, James F. Ryley, Micromachined Reactors for Catalytic Partial Oxidation Reactions Aiche Journal. ,vol. 43, pp. 3059- 3069 ,(1997) , 10.1002/AIC.690431117
E. Yoon, K.D. Wise, A wideband monolithic RMS-DC converter using micromachined diaphragm structures IEEE Transactions on Electron Devices. ,vol. 41, pp. 1666- 1668 ,(1994) , 10.1109/16.310122
Samuel B. Schaevitz, A MEMS thermoelectric generator Massachusetts Institute of Technology. ,(2000)