Plasma enhanced chemical deposition for high and/or low index of refraction polymers
作者： John D. Affinito
DOI:
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摘要: A method for making a polymer layer with selected index of refraction. The includes flash evaporating precursor material capable cross linking into the refraction, forming an evaporate, passing evaporate to glow discharge electrode creating plasma from and cryocondensing on substrate as condensate crosslinking thereon, resulting radicals created in plasma, having
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