Single-Step Deposition of Au- and Pt-Nanoparticle-Functionalized Tungsten Oxide Nanoneedles Synthesized Via Aerosol-Assisted CVD, and Used for Fabrication of Selective Gas Microsensor Arrays

摘要: Tungsten oxide nanostructures functionalized with gold or platinum NPs are synthesized and integrated, using a single-step method via aerosol-assisted chemical vapour deposition, onto micro-electromechanical system (MEMS)-based gas-sensor platforms. This co-deposition is demonstrated to be an effective route incorporate metal nanoparticles (NP) combinations of into nanostructured materials, resulting in attractive way tuning functionality oxides (MOX). The results show variations electronic sensing properties tungsten according the introduced, which used discriminate effectively analytes (C2H5OH, H2, CO) that present proton-exchange fuel cells. Improved characteristics, particular observed at 250 °C Pt-functionalized films, whereas non-functionalized films responses low concentrations CO temperatures. Differences characteristics these attributed different reactivities (Au Pt), degree interaction MOX/metal NP interface. presented this work has advantages over other methods integrating nanomaterials devices, having fewer processing steps, relatively temperature, no requirement for substrate pre-treatment.