Design of Spring Coupling for High- $Q$ High-Frequency MEMS Filters for Wireless Applications

摘要: A second-order microelectromechanical systems (MEMS) filter with high selectivity and sharp rolloff is required in wireless transceivers used dense sensor networks (WSNs). These sensors are expected to replace existing wired industrial-plant management environmental monitoring. filters, together MEMS-based oscillators mixers, off-chip components enable the development of a single-chip transceiver. Such transceiver will leverage integrated MEMS components' characteristics operate at lower power and, hence, longer battery life, making autonomous WSNs more feasible wider range applications. As result, this paper presents design optimization coupling beam wineglass-mode micromechanical disk filters using simulated annealing. The under consideration consists two identical resonators, mechanically coupled by flexural-mode beam. two-resonator system exhibits mechanical-resonance modes closely spaced frequencies that define passband. constraint added on length eliminate effect coupling-beam mass filter's resonant frequency. new process flow proposed realize self-aligned overhanging beams designed paper.