A heater-integrated scanning probe microscopy probe array with different tip radii for study of micro-nanosize effects on silicon-tip/polymer-film friction
作者： Haifei Bao , Xinxin Li
DOI: 10.1063/1.2885682
关键词:
摘要: Electric-heated cantilever-tip probes fabricated by micromachining techniques can be used for high-density data storage, nanopatterning, etc., where contact-scanning and thermal-plastic nanowritings are frequently implemented on the surface of a polymer thin-film such as polymethylmethacrylate (PMMA). In kind applications, micro-nanofriction effects, e.g., contacting-size temperature effects tip/film friction system, will largely influence performance applications. To elucidate present research fabricates monolithically integrated probe array that comprises three scanning microscopy with different tip radii tens nanometers, submicrometers microns, respectively. The is enabled an electric-heating function integrating heating resistors tip. Using tips, experiment shows obvious contacting-area effect. Within wide range, signal normal force load exhibit nonlinear relationship nanoradius but linear submicron With heated directly reveals significant size adhesion behaviors. It found glassy transition PMMA film characterized using tip, while nanotip suited to detect secondary beta process. By fitting experimental into power law apparent coefficient included, temperature-effect combined effect micronano tip/polymer modeled discussed.
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