Method of supplying fluorine
作者： Andrew William Shuttleworth , Graham Hodgson
DOI:
关键词:
摘要: In a method of delivering high purity fluorine to processing system, an on-site generator supplies fixed storage tank, from which the is supplied system. To provide back up generator, also provided in transportable gas vessel, for example, multi-cylinder pack at relatively low pressure, typically less than 35 psig. The vessel selectively connected tank as required enable amount within be maintained desired level.
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