Change in wettability of water on Si after ion treatment by aging under water and in air
作者： Noriyuki Inoue , Morikazu Kikuchi , Toshio Shima , Mitsuo Iwase , Yoshitake Nishi
DOI: 10.1016/0375-9601(91)90071-F
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摘要: Abstract An argon ion sputtering increases the wettability of Si surface. The aging at 300 K decreases wettability. decrease is larger when performed in water than air.
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