High precision optical surface sensor.

摘要: A noncontact optical surface sensor with <1-nm resolution has been developed. The principle of this high precision (HIPOSS) is based on the focus detection technique which employed in pickup for disks. For detection, we chose critical angle method total reflection used steep reflectivity change around angle. HIPOSS was designed to increase sensitivity and eliminate some errors nanometer order profilometer use. size head as small 45 × 30 65 mm, so it can be installed side by a diamond stylus profile measuring instrument. These styli, if term an stylus, interchanged easily obtain data same different means, contact noncontact. repeatability going returning measurements rms, difference between also below 1-nm rms most example surfaces. Using speed response HIPOSS, 3-D measurement over workpiece in-process ultraprecise turning are demonstrated.