Design and fabrication of electrostatic micro-cantilever array as audible frequency generator

摘要: Abstract In assistive technologies involving voice communication, an audio signal with specific shape is needed. this regard, the design and fabrication of electrostatic cantilever array proposed. An four metallic micro-cantilevers dimensions 650 μm × 200 μm × 0.3 μm fabricated on silicon substrate. The working principle based effect generated due to a conductive path applied between electrodes. results are taken from zinc oxide (ZnO) piezoelectric thin film that allows making contact vibrating cantilevers specified input impulse signals. demonstrated switching action depends polarity pulses. obtained compared FEM (COMSOL Multiphysics) model designed analyzed prior experiment. Further, experimental showed good agreement predicted values calculated by simulated for synchronously all micro-cantilevers. However, asynchronous actuation mode, result as-fabricated device variation than results. vibrations periodically output shows resultant signals very much in audible frequency range.