Image sensor having curved micro-mirrors over the sensing photodiode and method for fabricating
作者： Vincent Venezia , Hsin Chih Tai
DOI:
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摘要: The invention involves the integration of curved micro-mirrors over a photodiode active area (collection area) in CMOS image sensor (CIS) process. reflect light that has passed through collection back into photo diode. are best implemented backside illuminated device (BSI).
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