Comparison of Transduction Efficiency for Energy Harvester between Piezoelectric Modes
作者： Jung-Hyun Park , Hosang Ahn , Seon-Bae Kim , Seung-Hyun Kim , Dong-Joo Kim
DOI: 10.1007/978-1-4419-8825-6_5
关键词:
摘要: The efficiency of micro-electro-mechanical systems (MEMS) energy harvesters using transverse and longitudinal piezoelectric modes was studied. Since the emergence MEMS harvesters, studies have mainly focused on improving conversion at a given strain transduction layer. mode has been applied to use higher d33 coefficient lead zirconate titanate oxide (PZT) material, but few verified its distinguished compared that d31. PZT thin films were deposited Pt/Ti/SiO2 ZrO2/SiO2 substrates as by chemical solution deposition method. rectangular cantilever with Si proof mass fabricated an SOI wafer, it 20 μm device cantilevered in same size respectively for {3-1} {3-3} parallel electrode plates interdigitated electrodes (IDE). generated voltage power analyzed considering constants modes. harvester seems be strongly affected IDE configuration, study this is accompanied. This might give direction choosing transducers based material study.
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