Effects of Roll-to-Roll Sputtering Conditions on the Properties of Flexible TiO 2 Films

摘要: Flexible TiO₂ films were deposited as dielectric materials for high-energy-density capacitors on polyethylene terephthalate (PET) substrates using a roll-to-roll sputtering method. Both the growth behavior and electrical properties of flexible dependent pressure O₂/Ar gas ratio during process. All had an amorphous structure regardless conditions due to low substrate temperature. Microstructural characteristics such surface morphology roughness degraded with increase in O₂ concentration. The at showed better than those high pressure. prepared 10 mTorr exhibited constant approximately 90 1 kHz leakage current density 5 ~ 6 × -7 A/㎠ 3 MV/cm.