The measurement of thermal conductivities using the photothermal deflection method for thin films with varying thickness
作者： H. J. Kim , J. H. Kim , P. S. Jeon , J. Yoo
DOI: 10.1007/S12206-009-0701-0
关键词:
摘要: This study considers non-contact methods that obviate the causes of measurement error, such as thermal contact resistance and unnecessary destruction samples. Among methods, photothermal deflection method has been adopted developed to measure conductivities thin-film materials. To apply for thin films, bi-layered materials are manufactured by depositing film on Corning 7740 glass plates. The also investigates optimal modulation frequency, related diffusion length sample, measuring films.. Aluminum, TiO2, Si3N4 films with micro/nanometer thickness were selected objects measurement; these experimentally measured. Samples ranging from 1 µm 200 nm prepared variations in thickness. It was observed conductivity submicroscale decreased reduced.
springer.com
j-mst.org 参考文章(14)
William Alexander, James F. Shackelford, The CRC Materials Science And Engineering Handbook ,(1991)
Teruo Arai, Akira Ono, Tetsuya Baba, Thermographic investigation of laser flash diffusivity measurement High Temperatures-high Pressures. ,vol. 19, pp. 143- 147 ,(1987)
Jean-Pol Hiernaut, Claudio Ronchi, Fumihiro Sakuma, Determination of the melting point and the emissivity of refractory metals with a six-wavelength pyrometer High Temperatures-high Pressures. ,vol. 21, pp. 139- 148 ,(1989)
J Sell, J.A. Sell, Photothermal Investigations of Solids and Fluids ,(1989)
R.E. Taylor, W.D. Kimbrough, R.W. Powell, Thermophysical properties of tantalum, tungsten, and tantalum-10 wt. per cent tungsten at high temperatures Journal of the Less Common Metals. ,vol. 24, pp. 369- 382 ,(1971) , 10.1016/0022-5088(71)90023-3
A. Cezairliyan, A. P. Miiller, Specific heat capacity and electrical resistivity of a carbon-carbon composite in the range 1500?3000 K by a pulse heating method International Journal of Thermophysics. ,vol. 1, pp. 317- 326 ,(1980) , 10.1007/BF00517129
David G. Cahill, M. Katiyar, J. R. Abelson, Thermal conductivity of a -Si:H thin films Physical Review B. ,vol. 50, pp. 6077- 6081 ,(1994) , 10.1103/PHYSREVB.50.6077
A. Salazar, A. Sánchez‐Lavega, J. Fernández, Thermal diffusivity measurements in solids by the ‘‘mirage’’ technique: Experimental results Journal of Applied Physics. ,vol. 69, pp. 1216- 1223 ,(1991) , 10.1063/1.347306
A. Salazar, A. Sánchez‐Lavega, J. Fernández, Theory of thermal diffusivity determination by the ‘‘mirage’’ technique in solids Journal of Applied Physics. ,vol. 65, pp. 4150- 4156 ,(1989) , 10.1063/1.343320
Xiao Chen, Jingtao Zhu, Gang Yin, Li Zhao, None, Thermal diffusivity of surface-microstructured silicon measured by photothermal deflection technique Materials Letters. ,vol. 60, pp. 63- 66 ,(2006) , 10.1016/J.MATLET.2005.07.072