Scanning-type lithographic and image-pickup device using optical fiber

摘要: A scanning-type lithographic and image-pickup device causes the terminal face of either a projecting optical fiber or picking-up to scan given object in plane real image an objective lens, projects light through onto object, receives reflected photoluminescence fiber. When this is applied spectromicroscope, quantitative surface information can be spectrally measured with high resolution reproducibility. contracting-projection exposure selective laser annealing device, positional alignment pattern correction easily effected accuracy productivity. Simultaneous fabrication plurality electronic components also obtained by use device.