A bulk acoustic mode single-crystal silicon microresonator with a high-quality factor
作者： J E-Y Lee , Y Zhu , A A Seshia
DOI: 10.1088/0960-1317/18/6/064001
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摘要: This paper details a bulk acoustic mode resonator fabricated in single-crystal silicon with quality factor of 15 000 air, and over million below 10 mTorr at resonant frequency 2.18 MHz. The is square plate that excited the square-extensional has been commercial foundry silicon-on-insulator (SOI) MEMS process through MEMSCAP. also presents simple method extracting parameters from raw measurements heavily buried electrical feedthrough. Its accuracy demonstrated comparison between extracted motional resistance values measured different voltage biases those predicted an analytical model. Finally, substantially cancelling feedthrough system-level electronic implementation introduced.
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