The search for low-/spl epsiv/ and ultra-low-/spl epsiv/ dielectrics: how far can you get with polymers? Part 2: materials, structures, properties

作者: G. Maier

DOI: 10.1109/MEI.2004.1307082

关键词:

摘要: … silanol end groups from monomer hydrolysis. Curing occurs by condensation of the silanol … Consequently, the density of free fluorine radicals is reduced when hydrogen is present, …

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