Substrate transport vacuum platform
作者： Christopher Hofmeister , Martin Hosek
DOI:
关键词:
摘要: An apparatus including a first device configured to support at least one substrate thereon; and transport having the connected thereto. The is carry device. includes plurality of supports which are movable relative another along linear path; magnetic bearing partially couples another. A bearings permanent magnet second magnet. supports. field adjuster move and/or vary influence
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