Light blocking layers in MEMS packages

作者: Terry Tarn , Satyadev Patel , Andrew Huibers

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摘要: Disclosed herein is a micromirror array device package having light absorbing material disposed within the for reducing undesired scattering. The can be deposited as thin film (or strip, frame, segments or combination thereof), vertical wall insert between and cover substrate of package.

参考文章(2)
Steven Webster, Thomas P. Glenn, Roy Dale Hollaway, Micromirror device package fabrication method ,(2001)
Andrew G. Huibers, Satyadev R. Patel, Robert M. Duboc, Spatial light modulators with light absorbing areas ,(2002)