Micro-electrochemical valves and method

摘要: A micromachined valve and array having one or more pores which are electrochemically opened closed by dissolving redepositing a barrier layer across tiny opening pore in substrate. The is spanned two electrodes apply voltage to an electrolytic material dissolves electrolyte. Each open has distinct flow rate related its minimal cross-sectional area together can form binary sized with each subsequent member the twice as large preceding array. Any integral multiple of smallest may be achieved appropriate combination addressing logic. In preferred embodiment, bit representation desired acts switch for corresponding position.