Structure of alumina oxide coatings deposited by impulse plasma method

摘要: Abstract Al 2 O 3 coatings were produced by the LPD method with use of solid precursors aluminium oxide. The deposited on non-heated substrates and heated from an external heat source at various geometries substrate/impulse plasma stream arrangement. Depending technological variant employed, obtained composed metastable or stable monotropic phases. process parameters also affected morphology coatings. IR, RS XPS examinations atomic structure coatings, performed in present study earlier investigations, have shown that oxide impulse a nanocrystalline amorphous structure. phase composition can be modified heating substrate stationary way during IPD process, to temperature 500 K.