Thermal conductivity of ZrO2 thin films

摘要: Abstract The thermal conductivity of thin solid films may be considerably lower than bulk material ones. We have recently developed a new photothermal method which enables the determination dielectric films, on various kind substrates, with an accuracy better 10 %. In this paper, we present two kinds ZrO2 (stabilized Y2O3 or not). observe that decrease in thickness leads to drastic drop λa. has similar shape for phases. Phonons boundary scattering cannot contribute so significantly reduction most satisfactory explanation is λa affected by additional resistance R, especially between and alumina substrate. future, intend study more detail structures interfaces.