Design and Fabrication of a MEMS-Based Break Junction Device for Mechanical Strain-Correlated Optical Characterization of a Single-Molecule
作者： Hyunhak Jeong , Lucas K. Domulevicz , Joshua Hihath
DOI: 10.1109/JMEMS.2020.3038024
关键词:
摘要: Here, we propose a robust lab-on-a-chip system for multi-dimensional (electrical, optical, and mechanical) characterization of single-molecule utilizing Si micromachined micro-electromechanical-system (MEMS) chip. Our MEMS-based break junction (MEMS-BJ) utilizes conventional MEMS chip fabrication techniques to create an electrostatic comb actuator capable trapping between two nanoscale metal electrodes with sub-nanometer displacement resolution. In order achieve this functionality, components the (e.g flexural spring, drive fingers) are delicately designed based on analytical model basic performance parameters verified using finite element analysis simulation capacitive sensor measurements. Using system, able perform combined Raman spectroscopy molecular conductance measurements in real-time. Finally, present representative case study by analyzing correlated electrical, mechanical information while mechanically modulating strain which allows direct observation interplay structure electron transport. We believe that our MEMS-BJ will enable deeper at level promoting development new methods chemical biological applications. [2020-0307]
sci-hub.st 参考文章(29)
H. D. Espinosa, B. C. Prorok, Size effects on the mechanical behavior of gold thin films Journal of Materials Science. ,vol. 38, pp. 4125- 4128 ,(2003) , 10.1023/A:1026321404286
Sang Won Yoon, Vibration Isolation and Shock Protection for MEMS. ,(2009)
Min-Hang Bao, Analysis and Design Principles of MEMS Devices ,(2005)
D. G. de Oteyza, P. Gorman, Y.-C. Chen, S. Wickenburg, A. Riss, D. J. Mowbray, G. Etkin, Z. Pedramrazi, H.-Z. Tsai, A. Rubio, M. F. Crommie, F. R. Fischer, Direct Imaging of Covalent Bond Structure in Single-Molecule Chemical Reactions Science. ,vol. 340, pp. 1434- 1437 ,(2013) , 10.1126/SCIENCE.1238187
Nikolai Sergueev, Leonidas Tsetseris, Kalman Varga, Sokrates Pantelides, Configuration and conductance evolution of benzene-dithiol molecular junctions under elongation Physical Review B. ,vol. 82, pp. 073106- ,(2010) , 10.1103/PHYSREVB.82.073106
Mondher Labbane, Nripendra K. Saha, Edward C. Ting, Yield criterion and loading function for concrete plasticity International Journal of Solids and Structures. ,vol. 30, pp. 1269- 1288 ,(1993) , 10.1016/0020-7683(93)90016-Z
J. M. van Ruitenbeek, A. Alvarez, I. Piñeyro, C. Grahmann, P. Joyez, M. H. Devoret, D. Esteve, C. Urbina, Adjustable nanofabricated atomic size contacts Review of Scientific Instruments. ,vol. 67, pp. 108- 111 ,(1996) , 10.1063/1.1146558
Banqiu Wu, Ajay Kumar, Sharma Pamarthy, High aspect ratio silicon etch: A review Journal of Applied Physics. ,vol. 108, pp. 051101- ,(2010) , 10.1063/1.3474652
Vijay K. Mitra, William M. Risen, Ray H. Baughman, A laser Raman study of the stress dependence of vibrational frequencies of a monocrystalline polydiacetylene The Journal of Chemical Physics. ,vol. 66, pp. 2731- 2736 ,(1977) , 10.1063/1.434219
Toshiki Hirano, Dai Kobayashi, Tomotake Furuhata, Hiroyuki Fujita, Electroplated and Dry-Released Metallic Microstructures for a Lateral Tunneling Unit Application Japanese Journal of Applied Physics. ,vol. 33, pp. 1202- 1208 ,(1994) , 10.1143/JJAP.33.1202