Micromachining of quartz with ultrashort laser pulses

摘要: Well-defined and highly reproducible channels of a few micrometres diameter lengths over 1 mm have been produced in quartz with laser pulses 790 nm wavelength (Ti:sapphire) pulse 100-200fs. The channel depth can be controlled by the fluence number shots. Comparisons were made 1.3 ps, 2.8 30 5 ns. micromachining fs was found to much more controllable than longer less damage material.