Role of length scale and temperature in indentation induced creep behavior of polymer derived Si–C–O ceramics

摘要: Abstract This investigation presents nanoindentation and microindentation creep analyses on polymer derived Si–C–O ceramic coatings at temperatures ranging from room temperature to 500 °C. The properties of focus include elastic modulus, hardness, exponent, strain rate. Analyses show that the nanoscopic length scale deformation mechanism is dominated by dislocation climb diffusion. With increase in microscale thermal activation volume increases approximately 10 times. free leads switching volumetric densification pile up. An important physical effect analyzed observed mechanism. At nanoscale, with temperature, both hardness moduli an increase. microscale, however, reduces temperature. indentation size scales. However, nanoscale linked hardening. a softening behavior observed.