WO 3 nanoparticle with MEMS technology improve the sensing response by HWCVD system
作者： Chih-Hung Lin , Shoou-Jinn Chang , Ting-Jen Hsueh
DOI: 10.1109/NEMS.2017.8017003
关键词:
摘要: In this work, a simple and cost effective MEMS based gas sensor incorporating with WO 3 nanoparticle is presented of the measurement nitric oxide on ppb level. The NPs synthesis, it was deposited Pt/Ni/SiN x /SiO 2 /Silicon substrate by HWCVD thermal furnace annealing process. sample characterized using SEM, XRD, EDS; electrical measurements for transient resistance keithley 2400 source meter. good sensing response optimum at temperature 150, then exhibited remarkably high from lower concentration were ∼10.34%, 19.7% 29.06% 50, 150 250 ppb, respectively.
sci-hub.se 参考文章(13)
Uroš Cvelbar, Kostya (Ken) Ostrikov, Aleksander Drenik, Miran Mozetic, Nanowire sensor response to reactive gas environment Applied Physics Letters. ,vol. 92, pp. 133505- ,(2008) , 10.1063/1.2905265
Ting-Jen Hsueh, Cheng-Liang Hsu, Fabrication of gas sensing devices with ZnO nanostructure by the low-temperature oxidation of zinc particles Sensors and Actuators B-chemical. ,vol. 131, pp. 572- 576 ,(2008) , 10.1016/J.SNB.2007.12.045
Mahanth Prasad, Vinod Kumar Khanna, None, A low-power, micromachined, double spiral hotplate for MEMS gas sensors Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 21, pp. 2123- 2131 ,(2015) , 10.1007/S00542-014-2393-3
Lei Zhang, Feng-Chun Tian, Xiong-Wei Peng, Xin Yin, A rapid discreteness correction scheme for reproducibility enhancement among a batch of MOS gas sensors Sensors and Actuators A-physical. ,vol. 205, pp. 170- 176 ,(2014) , 10.1016/J.SNA.2013.11.015
Gabriele Rescio, Alessandro Leone, Pietro Siciliano, Supervised expert system for wearable MEMS accelerometer-based fall detector Journal of Sensors. ,vol. 2013, pp. 1- 11 ,(2013) , 10.1155/2013/254629
Cigdem Dulgerbaki, Neslihan Nohut Maslakci, Ali Ihsan Komur, Aysegul Uygun Oksuz, PEDOT/WO3 Hybrid Nanofiber Architectures for High Performance Electrochromic Devices Electroanalysis. ,vol. 28, pp. 1873- 1879 ,(2016) , 10.1002/ELAN.201501154
Haitao Li, Xiaoyi Mu, Yuning Yang, Andrew J. Mason, Low Power Multimode Electrochemical Gas Sensor Array System for Wearable Health and Safety Monitoring IEEE Sensors Journal. ,vol. 14, pp. 3391- 3399 ,(2014) , 10.1109/JSEN.2014.2332278
Samaneh Matindoust, Majid Baghaei-Nejad, Mohammad Hadi Shahrokh Abadi, Zhuo Zou, Li-Rong Zheng, Food quality and safety monitoring using gas sensor array in intelligent packaging Sensor Review. ,vol. 36, pp. 169- 183 ,(2016) , 10.1108/SR-07-2015-0115
Damian Tworek, Izabela Kuprys-Lipinska, Wioletta Pietruszewska, Piotr Kuna, None, Two patterns of changes in nasal nitric oxide after lysine aspirin nasal challenge in patients with aspirin-exacerbated respiratory disease. American Journal of Rhinology & Allergy. ,vol. 26, pp. 428- 432 ,(2012) , 10.2500/AJRA.2012.26.3818
Maciej Trawka, Janusz Smulko, Lech Hasse, Claes-Göran Granqvist, Fatima Ezahra Annanouch, Radu Ionescu, Fluctuation enhanced gas sensing with WO3-based nanoparticle gas sensors modulated by UV light at selected wavelengths Sensors and Actuators B-chemical. ,vol. 234, pp. 453- 461 ,(2016) , 10.1016/J.SNB.2016.05.032