Piezoresistive silicon pressure sensor implementing long diaphragms with large aspect ratios
作者： David W. Burns , Max C. Glenn
DOI:
关键词:
摘要: A form of pressure sensor diaphragm and method making that allows for the formation long rectangular plate structures in semiconducting material, especially Silicon. plurality or multiplicity sensors may be constructed on a single chip, thus providing absolute relative sensing device.
google.com.br 参考文章(10)
Donna G Fricke, A critical study of the poetry of Jonathan Swift : A thesis in English : Submitted in partial fulfillment of the requirements for the degree of Doctor of Philosophy University Microfilms. ,(1988)
Stephen Clark Terry, John Hallock Jerman, Single diaphragm transducer with multiple sensing elements ,(1990)
Thomas G. Stratton, David W. Burns, Benjamin G. Hocker, Diedrich J. Saathoff, Amir R. Mirza, James K. Carney, Akintunde I. Ikinwande, Robert D. Horning, Method for making diaphragm-based sensors and apparatus constructed therewith ,(1992)
Joseph R. Mallon, Anthony D. Kurtz, Transducer structure employing vertically walled diaphragms with quasi rectangular active areas ,(1981)
James C. Bryan, Differential pressure transducers ,(1988)
Robert D. Horning, Thomas G. Stratton, David W. Burns, Amir R. Mirza, James K. Carney, Diedrich J. Saathoff, Benjamin G. Hocker, Akintunde I. Ikinwande, Backfilling method for producing a diaphragm containing microstructure ,(1992)
Edward F. Koen, Robert D. Vernon, Pressure sensor having a laminated substrate ,(1992)
Akira Sase, Seiichi Ugai, Tomoyuki Tobita, Satoshi Shimada, Integrierter multisensor und uebertrager eines statischen und differentiellen drucks und ein anlagensystem, die den integrierten multisensor verwenden ,(1991)
Fukuhara Satoshi, SEMICONDUCTOR PRESSURE SENSOR ,(1989)
Bunshiro Yamaki, Yutaka Tomisawa, Sadatake Kikuchi, Semiconductor pressure sensor ,(1984)