Vertical heat treatment apparatus and assembly of pressure detection system and temperature sensor
作者： Makoto Kobayashi
DOI:
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摘要: A vertical heat treatment apparatus including a furnace body having heater elements, and container, disposed in the body, for housing treating objects W to be treated. An air supply line an exhaust are connected body. blower valve mechanism line, line. protective tube is provided which penetrates through temperature sensor signal housed, pressure detection hole formed tube. hole.
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