Efficient Excitation of Micro/Nano Resonators and Their Higher Order Modes.

作者: Nizar Jaber , Md Abdullah Al Hafiz , SNR Kazmi , MH Hasan , F Alsaleem

DOI: 10.1038/S41598-018-36482-1

关键词:

摘要: … resonators at their fundamental and higher order … resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators …

参考文章(36)
Selim Olcum, Nathan Cermak, Steven C. Wasserman, Scott R. Manalis, High-speed multiple-mode mass-sensing resolves dynamic nanoscale mass distributions Nature Communications. ,vol. 6, pp. 7070- 7070 ,(2015) , 10.1038/NCOMMS8070
Baris Cagdaser, Bernhard E Boser, None, Resonant drive for stabilizing parallel-plate actuators beyond the pull-in point international conference on solid state sensors actuators and microsystems. ,vol. 1, pp. 688- 692 ,(2005) , 10.1109/SENSOR.2005.1496510
Søren Dohn, Rasmus Sandberg, Winnie Svendsen, Anja Boisen, None, Enhanced functionality of cantilever based mass sensors using higher modes Applied Physics Letters. ,vol. 86, pp. 233501- ,(2005) , 10.1063/1.1948521
I. Mahboob, H. Yamaguchi, Piezoelectrically pumped parametric amplification and Q enhancement in an electromechanical oscillator Applied Physics Letters. ,vol. 92, pp. 173109- ,(2008) , 10.1063/1.2903709
K.G. Ong, C.A. Grimes, C.L. Robbins, R.S. Singh, Design and application of a wireless, passive, resonant-circuit environmental monitoring sensor Sensors and Actuators A-physical. ,vol. 93, pp. 33- 43 ,(2001) , 10.1016/S0924-4247(01)00624-0
Jesús García-Cantón, Angel Merlos, Antonio Baldi, A wireless LC chemical sensor based on a high quality factor EIS capacitor Sensors and Actuators B-chemical. ,vol. 126, pp. 648- 654 ,(2007) , 10.1016/J.SNB.2007.04.025
J. Chaste, A. Eichler, J. Moser, G. Ceballos, R. Rurali, A. Bachtold, A nanomechanical mass sensor with yoctogram resolution Nature Nanotechnology. ,vol. 7, pp. 301- 304 ,(2012) , 10.1038/NNANO.2012.42
V.-N. Nguyen, S. Baguet, C.-H. Lamarque, R. Dufour, Bifurcation-based micro-/nanoelectromechanical mass detection Nonlinear Dynamics. ,vol. 79, pp. 647- 662 ,(2015) , 10.1007/S11071-014-1692-7
F. Massel, T. T. Heikkilä, J.-M. Pirkkalainen, S. U. Cho, H. Saloniemi, P. J. Hakonen, M. A. Sillanpää, Microwave amplification with nanomechanical resonators Nature. ,vol. 480, pp. 351- 354 ,(2011) , 10.1038/NATURE10628
Ali H Nayfeh, Mohammad I Younis, None, Dynamics of MEMS resonators under superharmonic and subharmonic excitations Journal of Micromechanics and Microengineering. ,vol. 15, pp. 1840- 1847 ,(2005) , 10.1088/0960-1317/15/10/008