作者: A. Llordés , K. Zalamova , S. Ricart , A. Palau , A. Pomar
DOI: 10.1021/CM903080K
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摘要: A thorough analytical study on the thermal decomposition evolution of metal-trifluoroacetate precursor toward high-performance YBa2Cu3O7 superconducting films is presented. Evolved gas analysis (EGA), using Fourier transform infrared spectroscopy (FTIR) and mass spectrometry (MS), as well X-ray diffraction (XRD), was performed to determine complete chemical reaction precursors. It noteworthy that, contrary what had been previously described, HF not detected in released gas. Moreover, we present new processing conditions that successfully reduced even eliminated undesirable porosity pyrolyzed films. Focused-ion-beam (FIB) studies demonstrated formation pores related a fast escape during decomposition. The oxygen partial pressure determined be key parameter control both kinetics thermodynamics and, hence, porosity. This ...