Mechanical properties of AlxGa1−xN films with high Al composition grown on AlN/sapphire templates
作者： F. J. Xu , B. Shen , M. J. Wang , J. Xu , L. Lu
DOI: 10.1063/1.2735551
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摘要: Mechanical properties of AlxGa1−xN thin films with high Al composition (0.33⩽x⩽1) grown on AlN/sapphire templates have been investigated by means the nanoindentation technique. It is found that Young’s modulus E increases increasing composition. In addition, it also occurrence clear and sudden displacement discontinuity (“pop-in”) in plastic deformation (PD) process dependent films. The higher results less pop-in PD With composition, believed increase bond strength decrease lattice mismatch between result greater resistance to formation dislocations, which responsible for behavior
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