Aspherical microstructure, and method of fabricating the same
作者： Takashi Ushijima , Takayuki Yagi
DOI:
关键词:
摘要: As a method of fabricating aspherical microstructures, protruding microstructure is formed on substrate, an aspherical-profile forming layer the substrate and microstructure, hardened. An profile due to surface tension in step layer, maintained through hardening layer.
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