WAFER TRANSFER MICROCLIMATE TECHNIQUES AND APPARATUSES, INCLUDING HORIZONTAL SLOT IMPLEMENTATIONS AND/OR TRAVELLING SHOWERHEADS
作者： Blank Richard M , Singh Harmeet , Gould Richard Howard , Witkowicki Derek John , Salek Mohsen
DOI:
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摘要: Systems and techniques for forming buffer gas microclimates around semiconductor wafers in environments external to a processing chamber are disclosed. Such systems may include slot doors that allow single be removed from multi-wafer stack while limiting outflow of storage system, as well distributors move tandem with robot arms used transport at least some the movements such arms.
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