Ultra-low power magnetoelectric magnetic field sensor
作者： Lacomb Julie , Matis Bernard R , Lacomb Ronald , Baldwin Jeffrey W , Zappone William
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摘要: A high-sensitivity and ultra-low power consumption magnetic sensor using a magnetoelectric (ME) composite comprising of magnetostrictive piezoelectric layers. This exploits the magnetically driven resonance shift free-standing micro-beam resonator. Also disclosed is related method for making sensor.
lens.org 参考文章(18)
Yu Hui, Tianxiang Nan, Nian X. Sun, Matteo Rinaldi, High Resolution Magnetometer Based on a High Frequency Magnetoelectric MEMS-CMOS Oscillator IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 24, pp. 134- 143 ,(2015) , 10.1109/JMEMS.2014.2322012
Matteo Rinaldi, Tianxiang Nan, Nian-Xiang Sun, Yu Hui, Systems and methods for magnetic field detection ,(2014)
Julius Ming Lin Tsai, Ilker E. Ocak, Navab Singh, Electromechanical device and method of fabricating the same ,(2014)
S. P. Bennett, J. W. Baldwin, M. Staruch, B. R. Matis, J. LaComb, O. M. J van 't Erve, K. Bussmann, M. Metzler, N. Gottron, W. Zappone, R. LaComb, P. Finkel, Magnetic field response of doubly clamped magnetoelectric microelectromechanical AlN-FeCo resonators Applied Physics Letters. ,vol. 111, pp. 252903- ,(2017) , 10.1063/1.5011728
Yusuke Sakagami, 裕介 坂上, Magnetic sensor element and magnetic sensor ,(2008)
Mary Winters, Dae Ho Kim, Jeffrey B. Shealy, Ramakrishna Vetury, PIEZOELECTRIC ACOUSTIC RESONATOR MANUFACTURED WITH PIEZOELECTRIC THIN FILM TRANSFER PROCESS ,(2019)
Reinhard Knöchel, Eckhard Quandt, Robert Jahns, Method for measuring a magnetic field using magnetoelectric sensors ,(2012)
Jae Yoong Cho, Rebecca L. Peterson, Guohong He, Khalil Najafi, Jeffrey Gregory, Zongliang Cao, Yi Yuan, Microsystem device and methods for fabricating the same ,(2012)
Manfred R. Wuttig, Ichiro Takeuchi, Ultrasensitive magnetoelectric thin film magnetometer and method of fabrication ,(2007)
M. Staruch, C. Kassner, S. Fackler, I. Takeuchi, K. Bussmann, S. E. Lofland, C. Dolabdjian, R. Lacomb, P. Finkel, Effects of magnetic field and pressure in magnetoelastic stress reconfigurable thin film resonators Applied Physics Letters. ,vol. 107, pp. 032909- ,(2015) , 10.1063/1.4927309