Optical Channel Waveguides in AlGaAs Multiple Quantum Well Structures Formed by Focused Ion Beam Induced Compositional Mixing

作者: Mukesh Kumar , Gregory N. De Brabander , Peter Chen , Joseph T. Boyd , Andrew J. Steckl

DOI: 10.1557/PROC-281-313

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参考文章(13)
Koji Ishida, Kazunori Matsui, Toshiaki Fukunaga, Junji Kobayashi, Tetsuo Morita, Eizo Miyauchi, Hisao Nakashima, Scan speed effects on enhanced disordering of GaAs‐AlGaAs superlattices by focused Si ion beam implantation Applied Physics Letters. ,vol. 51, pp. 109- 111 ,(1987) , 10.1063/1.98639
T. Tang, P. Swanson, C. Herzinger, L. M. Miller, T. M. Cockerill, R. P. Bryan, T. A. DeTemple, J. J. Coleman, S‐bend loss in disorder‐delineated GaAs heterostructure laser waveguides with native and blue shifted active regions Applied Physics Letters. ,vol. 57, pp. 741- 743 ,(1990) , 10.1063/1.103431
M. C. Wu, M. M. Boenke, S. Wang, W. M. Clark, E. H. Stevens, M. W. Utlaut, GaAs/GaAlAs distributed Bragg reflector laser with a focused ion beam, low dose dopant implanted grating Applied Physics Letters. ,vol. 53, pp. 265- 267 ,(1988) , 10.1063/1.100142
F. Julien, P. D. Swanson, M. A. Emanuel, D. G. Deppe, T. A. DeTemple, J. J. Coleman, N. Holonyak, Impurity‐induced disorder‐delineated optical waveguides in GaAs‐AlGaAs superlattices Applied Physics Letters. ,vol. 50, pp. 866- 868 ,(1987) , 10.1063/1.98015
Koji Ishida, Takeshi Takamori, Kazunori Matsui, Toshiaki Fukunaga, Tetsuo Morita, Eizo Miyauchi, Hisao Hashimoto, Hisao Nakashima, Fabrication of Index-Guided AlGaAs MQW Lasers by Selective Disordering Using Be Focused Ion Beam Implantation Japanese Journal of Applied Physics. ,vol. 25, pp. L783- L785 ,(1986) , 10.1143/JJAP.25.L783
T. Wolf, C.‐L. Shieh, R. Engelmann, K. Alavi, J. Mantz, Lateral refractive index step in GaAs/AlGaAs multiple quantum well waveguides fabricated by impurity‐induced disordering Applied Physics Letters. ,vol. 55, pp. 1412- 1414 ,(1989) , 10.1063/1.101610
S.‐Tong Lee, G. Braunstein, P. Fellinger, K. B. Kahen, G. Rajeswaran, Disordering of Si‐implanted GaAs‐AlGaAs superlattices by rapid thermal annealing Applied Physics Letters. ,vol. 53, pp. 2531- 2533 ,(1988) , 10.1063/1.100199
Yasuhiro Suzuki, Hidetoshi Iwamura, Takeo Miyazawa, Osamu Mikami, Polarization mode selective channel waveguides in an InGaAs/InP disordered superlattice Applied Physics Letters. ,vol. 57, pp. 2745- 2747 ,(1990) , 10.1063/1.103774
Koji Ishida, Eizo Miyauchi, Tetsuo Morita, Takeshi Takamori, Toshiaki Fukunaga, Hisao Hashimoto, Hisao Nakashima, Fabrication of Submicron Grating Patterns Usinc Compositional Disordering of AlGaAs-GaAs Superlattices by Focused Si Ion Beam Implantation Japanese Journal of Applied Physics. ,vol. 26, pp. L285- L287 ,(1987) , 10.1143/JJAP.26.L285
E. Kapon, N. G. Stoffel, E. A. Dobisz, R. Bhat, Birefringent channel waveguides defined by impurity‐induced superlattice disordering Applied Physics Letters. ,vol. 52, pp. 351- 353 ,(1988) , 10.1063/1.99461