Advances in High-Voltage Modulators for Applications in Pulsed Power and Plasma-Based Ion Implantation

摘要: Modern pulsed power technology has its roots in the late 1950s and early 1960s, it was driven overwhelmingly by applications national defense carried out several countries, especially U.S., U.K., Russia, China. The following decades, particularly 1990s, witnessed an increased interest compact systems with pulse repetition rate that could be used nondefense such as treatment of material surfaces plasma beam interactions, pollutants, food sterilization, medical applications, etc. This spawned a new generation components (solid-state switches) led to completely solid-state modulators. paper describes how originally sources cathodic arcs converged produce for plasma-based ion implantation (PBII) related technologies. present state art is reviewed, prospects future advances are described, PBII.