Differential Shack-Hartmann curvature sensor: local principal curvature measurements

作者: Weiyao Zou , Kevin P. Thompson , Jannick P. Rolland

DOI: 10.1364/JOSAA.25.002331

关键词:

摘要: The concept of a differential Shack-Hartmann (DSH) curvature sensor was recently proposed, which yields wavefront curvatures by measuring slope differentials. As an important feature the DSH sensor, twist terms can be efficiently obtained from measurements, thus providing means to measure Monge-equivalent patch. Specifically, principal and directions, four key parameters in geometry, computed Laplacian terms. directions provide “complete” definition local shape. Given adequate sampling, these measurements useful quantifying mid-spatial-frequency errors, yielding complete characterization surface being measured.

参考文章(20)
Jannick Rolland, Weiyao Zou, Differential shack-hartmann curvature sensor ,(2006)
F. Roddier, M. Sarazin, The ESO differential image motion monitor Astronomy and Astrophysics. ,vol. 227, pp. 294- 300 ,(1990)
Claude Roddier, François Roddier, Wave-front reconstruction from defocused images and the testing of ground-based optical telescopes Journal of the Optical Society of America A. ,vol. 10, pp. 2277- 2287 ,(1993) , 10.1364/JOSAA.10.002277
François Roddier, Curvature sensing and compensation: a new concept in adaptive optics Applied Optics. ,vol. 27, pp. 1223- 1225 ,(1988) , 10.1364/AO.27.001223
Paul E. Glenn, Robust, sub-angstrom-level midspatial-frequency profilometry Advanced Optical Manufacturing and Testing. ,vol. 1333, pp. 175- 182 ,(1990) , 10.1117/12.22802
Paul E. Glenn, Robust, angstrom level circularity profilometry Advanced Optical Manufacturing and Testing. ,vol. 1333, pp. 230- 238 ,(1990) , 10.1117/12.22807
Roberto Ragazzoni, Pupil plane wavefront sensing with an oscillating prism Journal of Modern Optics. ,vol. 43, pp. 289- 293 ,(1996) , 10.1080/09500349608232742
Hareesh V. Tippur, Coherent gradient sensing: a Fourier optics analysis and applications to fracture Applied Optics. ,vol. 31, pp. 4428- 4439 ,(1992) , 10.1364/AO.31.004428
Ingolf Weingaertner, Michael Schulz, Peter Thomsen-Schmidt, Clemens Elster, Measurement of steep aspheres: a step forward to nanometer accuracy Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II. ,vol. 4449, pp. 195- 204 ,(2001) , 10.1117/12.450095