作者: Allen M. Barnett , Michael G. Mauk
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摘要: High efficiency, thin active-layer silicon solar cells and a process for their fabrications have been provided. The are characterized by capability of employing low-cost, metallurgical grade the substrate. substrate has dioxide barrier coating with electrical conductivity to active semiconductor layers provided multiplicity fine holes through oxide. therein afford continuity between comprises in situ formation on silicon, oxide photolithography, etching enabling nucleation growth epitaxy.