作者: H. Azizpour , M. Talebi , F.D. Tichelaar , R. Sotudeh-Gharebagh , J. Guo
DOI: 10.1016/J.APSUSC.2017.07.168
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摘要: Abstract Alumina films were deposited on titania nanoparticles via atomic layer deposition (ALD) in a fluidized bed reactor at 180 °C and 1 bar. Online mass spectrometry was used for real time monitoring of effluent gases from the during each reaction cycle order to determine optimal dosing precursors. Different oxygen sources see which source, combination with trimethyl aluminium (TMA), provides highest alumina growth per (GPC). Experiments carried out 4, 7 10 cycles using Several characterization methods, such as high resolution transmission electron microscopy (HRTEM), Brunauer-Emmett-Teller (BET), energy dispersive X-ray spectroscopy (EDX), Fourier transform infrared (FTIR), diffraction (XRD) instrumental neutron activation analysis (INAA), conducted products. Formation film confirmed by EDX mapping line profiling, FTIR TEM. When either water or deuterium oxide thickness greater than that ozone. The average GPC measured TEM ALD TMA water, ozone about 0.16 nm, 0.15 nm 0.11 nm, respectively. calculated fraction aluminum INAA close those images. Excess amounts precursors lead higher due insufficient purging time. XRD demonstrated amorphous coated nanoparticles. This easily distinguished crystalline core Decrease photocatalytic activity after coating measuring degradation Rhodamine B ultraviolet irradiation.