摘要: The irradiation of metals with short pulses (55 ns) an excimer laser in nitrogen containing atmosphere leads to important changes their surface if the melts and forms a plasma. depth these modifications is ranging up several micrometers. For iron decisive take-up into found. Besides that, additional superimposed effects like fall-out deposition crater formation can be observed. These are resolved by combination analyzing methods. Here, results resonant nuclear reaction analysis, Mossbauer spectroscopy, Rutherford backscattering spectrometry, profilometry will presented. influence lateral intensity distribution discussed. Altogether, this allows description profiles number pulses. raw beam irradiations analytical solution given, whereas homogenized fairly well described numerically.